Browsing by Author Boscoli F.A.

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PreviewIssue DateTitleAuthor(s)AdvisorType
2005Silicon Oxide Sacrificial Layer For Mems ApplicationsBiasotto C.; Boscoli F.A.; Teixeira R.C.; Ramos A.C.S.; Diniz J.A.; Daltrini A.M.; Moshkalyov S.A.; Doi I.-Artigo de evento