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Type: Artigo de periódico
Title: Structural And Optical Properties Of Plasma-deposited Amorphous Hydrogenated Oxygenated Carbon Films
Author: Durrant S.F.
De Oliveira R.T.
Castro S.G.C.
Bolivar-Marinez L.E.
Galvao D.S.
De Bica Moraes M.A.
Abstract: Amorphous hydrogenated oxygenated carbon (a-C:O:H) films were deposited from C 6H 6/O 2/ He/Ar mixtures in a deposition system fed rf power. The principal variable was the percentage of oxygen in the feed, R ox. Film structure and composition were investigated as a function of R ox using transmission infrared- and x-ray photoelectron spectroscopy. To some degree, greater values of R ox lead to greater incorporation of oxygen functionalities such as OH, C-O, and C=O into the deposited material. As revealed by ultraviolet-visible spectrophotometry, the optical gap E 04 increased from∼3.1 to ∼3.5 eV as R ox was increased from 0% to ∼50%. Semiempirical methods (PM3 and ZINDO-S/CI) allow modeling of the dependence of E 04 on 7 ox. Broad agreement between the results of the experimental and theoretical analyses was obtained. © 1997 American Vacuum Society.
Citation: Journal Of Vacuum Science And Technology A: Vacuum, Surfaces And Films. , v. 15, n. 3, p. 1334 - 1339, 1997.
Rights: aberto
Identifier DOI: 10.1116/1.580585
Date Issue: 1997
Appears in Collections:Unicamp - Artigos e Outros Documentos

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