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Type: Artigo de periódico
Title: Simple Reflectometric Method For Measurement Of Weakly Absorbing Films
Author: Surdutovich G.I.
Vitlina R.Z.
Baranauskas V.
Abstract: Abeles has shown that the processes of determination of the refractive index and thickness of a transparent film may be completely separated. When under varying incidence angle the relative reflectances of p-polarized light at a film-covered and uncovered substrate's surfaces become equal, this means that the angle of incidence coincides with the Brewster angle, θB1, of the ambient-film interface. From a complementary point of view, for a film with non-uniform thickness it is an angle where the interference fringes of all the interference patterns, corresponding to the different film thicknesses, disappear. Moreover, there is yet one angle, θB2, where a sample's reflection also ceases to depend on the film's thickness and the interference fringes disappear: this is the Brewster angle of the film-substrate interface. Since the reflectances from a growing film or from different places of a tapered film have the same values at these angles θB1 and θB2 the interference patterns should intersect each other at these specific points. For a weak absorptive film the diminution, due to film's absorption, of the reflectance at the angle θB1 allows us to determine the extinction coefficient of the film.
Editor: Elsevier Sequoia SA, Lausanne, Switzerland
Citation: Thin Solid Films. Elsevier Sequoia Sa, Lausanne, Switzerland, v. 355, n. , p. 446 - 450, 1999.
Rights: fechado
Identifier DOI: 10.1016/S0040-6090(99)00459-9
Date Issue: 1999
Appears in Collections:Unicamp - Artigos e Outros Documentos

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