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Type: Artigo de evento
Title: Structural Characterization Of Tio2/tinxoy (δ-doping) Heterostructures On (1 1 0)tio2 Substrates
Author: Chiaramonte T.
Cardoso L.P.
Gelamo R.V.
Fabreguette F.
Sacilotti M.
Marco de Lucas M.C.
Imhoff L.
Bourgeois S.
Kihn Y.
Casanove M.-J.
Abstract: TiO2/TiNxOy δ-doping structures were grown on the top of (110)TiO2 rutile substrates by low pressure metal-organic vapor phase epitaxy (LP-MOVPE) technique at 750°C. The samples were analyzed by high resolution transmission electron microscopy (HRTEM), electron energy loss spectroscopy (EELS) and X-ray diffraction techniques (rocking curves and φ-scans). The presence of satellites in the (110)TiO2 rocking curve revealed the epitaxial growth of 10 period δ-doping structures. The thickness of the TiO2 layers, 84nm, was deduced from the satellites period. HRTEM observations showed around 1.5nm thick δ-doping layers, where the presence of nitrogen was detected by EELS. The analysis of the Bragg surface diffraction peaks observed in the φ-scans points to an almost negligible strain in this sample which was confirmed by substrate curvature radius measurements. © 2003 Elsevier Science B.V. All rights reserved.
Citation: Applied Surface Science. , v. 212-213, n. SPEC., p. 661 - 666, 2003.
Rights: fechado
Identifier DOI: 10.1016/S0169-4332(03)00019-9
Date Issue: 2003
Appears in Collections:Unicamp - Artigos e Outros Documentos

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