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Type: Artigo de periódico
Title: Infrared Spectroscopy Investigation Of Various Plasma-deposited Polymer Films Irradiated With 170 Kev He+ Ions
Author: Gelamo R.V.
Trasferetti B.C.
Durrant S.F.
Davanzo C.U.
Rouxinol F.P.
Gadioli G.Z.
Bica de Moraes M.A.
Abstract: This work illustrates the advantages of using p-polarized radiation at an incidence angle of 70° in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 × 1014 to 1 × 1016 cm-2. Several bands not seen using the conventional mode could be observed in the polarized mode. © 2006 Elsevier B.V. All rights reserved.
Citation: Nuclear Instruments And Methods In Physics Research, Section B: Beam Interactions With Materials And Atoms. , v. 249, n. 1-2 SPEC. ISS., p. 162 - 166, 2006.
Rights: fechado
Identifier DOI: 10.1016/j.nimb.2006.03.105
Date Issue: 2006
Appears in Collections:Unicamp - Artigos e Outros Documentos

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