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Type: Artigo de evento
Title: Study Of Mode Transitions In Inductively Coupled Plasmas
Author: Daltrini A.M.
Moshkalyov S.A.
Monteiro M.J.R.
Machida M.
Besseler E.
Abstract: The transitions between low density and high density modes in an inductively coupled plasma reactor were studied by the measurements of different spectral line emissions in Ar plasmas. A described model for metastable atoms shows that the ratio of the emissions Ar 811.5 nm / Ar 750.4 nm is similar to the contribution of metastable ionization in electron production (two-step ionization). Then, the influence of the metastable atoms in the transition triggering was identified, mainly at high pressures. Also, the measurements show that metastable atoms can be a source for the sustaining of the H mode in the hysteresis region. © 2006 The Electrochemical Society.
Citation: Ecs Transactions. , v. 4, n. 1, p. 553 - 562, 2006.
Rights: fechado
Date Issue: 2006
Appears in Collections:Unicamp - Artigos e Outros Documentos

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