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Type: Artigo de evento
Title: Fabrication Of Multi-point Test Structures Using Focused Ion Beam And Selective Carbon Nanotubes Deposition By Dielectrophoresis
Author: Da Silva M.M.
Vaz A.R.
Verissimo C.
Moshkalev S.A.
Swart J.W.
Abstract: In this work, we present experimental procedures developed for fabrication of multi-point test structures using focused ion beam. The test structure is fabricated in two steps: (i) metal (Au, Pd) electrodes are fabricated by lift-off technique. (ii) nanocontacts are fabricated by ion beam induced deposition of platinum and milling with Ga ion beam. The multi-wall nanotubes (MWNT) are deposited by dielectrophoresis method between metal electrodes. Our test structure allows measurements using 2 and 4 terminals methods. © The Electrochemical Society.
Citation: Ecs Transactions. , v. 14, n. 1, p. 473 - 475, 2008.
Rights: fechado
Identifier DOI: 10.1149/1.2956063
Date Issue: 2008
Appears in Collections:Unicamp - Artigos e Outros Documentos

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