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Type: Artigo de evento
Title: Integration Of Carbon Nanotubes In Microelectronics
Author: Swart J.
Moshkalev S.
Abstract: Practical aspects of synthesis and applications of single-wall and multi-wall carbon nanotubes (SWNT and MWNT, respectively) are presented. Among numerous potential applications, utilization of nanotubes for interconnections in microelectronics and in gas sensors is considered in more detail. The issues related to compatibility of nanotubes synthesis and manipulation processes with the Si planar technology are analysed. © 2008 IEEE.
Citation: International Conference On Solid-state And Integrated Circuits Technology Proceedings, Icsict. , v. , n. , p. 584 - 587, 2008.
Rights: fechado
Identifier DOI: 10.1109/ICSICT.2008.4734606
Date Issue: 2008
Appears in Collections:Unicamp - Artigos e Outros Documentos

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