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Type: Artigo de evento
Title: Gas-phase And Plasma-surface Reactions In Radiofrequency Discharges Of C2h2-n2-noble Gas Mixtures
Author: Durrant S.F.
Bica de Moraes M.A.
Rouxinol F.P.
Abstract: Actinometric optical emission spectrometry was used to determine the relative concentrations of the species H, CH, N2 and CN as a function of the ratio of the nitrogen flow rate to the acetylene flow rate in acetylene-nitrogen-helium-argon mixtures. The forms of these concentration functions are discussed in terms of gas-phase molecular fragmentation and plasma/film-surface interactions. In plasmas fed only noble gases, additional experiments revealed the occurrence of plasma/film-surface reactions that produce significant plasma concentrations of the species CN provided that a nitrogenated carbon film was previously deposited in the chamber. In contrast, there is no appreciable concentration of the species CH in plasmas of noble gases in the presence of a-C:H:N films on the chamber walls. © 2001 Elsevier Science B.V. All rights reserved.
Citation: Thin Solid Films. , v. 398-399, n. , p. 156 - 162, 2001.
Rights: fechado
Identifier DOI: 10.1016/S0040-6090(01)01460-2
Date Issue: 2001
Appears in Collections:Unicamp - Artigos e Outros Documentos

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