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Type: Artigo de evento
Title: Structural Characterization Of Tinxoy/tio2 Single Crystalline And Nanometric Multilayers Grown By Lp-mocvd On (110)tio2
Author: Fabreguette F.
Guillot J.
Cardoso L.P.
Marcon R.
Imhoff L.
Marco De Lucas M.C.
Sibillot P.
Bourgeois S.
Dufour P.
Sacilotti M.
Abstract: TiO2/TiNxOy superlattices were grown by Low Pressure-Metal-Organic Vapor Phase Epitaxy (LP-MOVPE) technique at deposition temperatures ranking from 650 to 750°C. The growth was performed on top of TiO2(110) rutile substrates. Intense peaks observed in the X-rays rocking curves and θ-2θ diffraction patterns show the presence of crystalline epilayers. The TiNxOy layers were grown in a (200) cubic structure on the (110) quadratic TiO2 epilayer structure. Transmission electron microscopy confirmed the XRD results and showed the formation of periodic and well structured epilayers. © 2001 Elsevier Science B.V. All rights reserved.
Citation: Thin Solid Films. , v. 400, n. 1-2, p. 125 - 129, 2001.
Rights: fechado
Identifier DOI: 10.1016/S0040-6090(01)01493-6
Date Issue: 2001
Appears in Collections:Unicamp - Artigos e Outros Documentos

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