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Type: Artigo de periódico
Title: Micro-crystalline Diamond And Nano-carbon Structures Produced Using A High Argon Concentration In Hot-filament Chemical Vapor Deposition
Author: Baranauskas V.
Peterlevitz A.C.
Ceragioli H.J.
Durrant S.F.
Abstract: The carbon structures and micro-crystalline diamond produced using argon in high concentrations in a hot-filament chemical vapor deposition (CVD) reactor fed with a mixture of ethanol and hydrogen were studied. Well faceted diamond films with vertical flaws, layered structures with diamond-like carbon (DLC) balls and spongy structures of carbon wires were obtained using the method. Argon was found to minimize the growth rate of hydrogenated materials formed in the intergranular spaces of columnar CVD diamond films and at the interstitial sites of deposited carbon-nuclei structures. Modified kinetics of the carbon deposition process, increase in number of flaws between the diamond grains and increased porosity was observed due to the action of argon.
Citation: Journal Of Vacuum Science And Technology, Part A: Vacuum, Surfaces And Films. , v. 19, n. 4, p. 1057 - 1062, 2001.
Rights: aberto
Identifier DOI: 10.1116/1.1366701
Date Issue: 2001
Appears in Collections:Unicamp - Artigos e Outros Documentos

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