Please use this identifier to cite or link to this item: http://repositorio.unicamp.br/jspui/handle/REPOSIP/95647
Full metadata record
DC FieldValueLanguage
dc.contributor.CRUESPUNIVERSIDADE DE ESTADUAL DE CAMPINASpt_BR
dc.typeArtigo de periódicopt_BR
dc.titleA Contribution Of Vibrationally Excited Cl2 Molecules To Gaas Reactive Ion Etching In Cl2/arpt_BR
dc.contributor.authorMoshkalyov S.A.pt_BR
dc.contributor.authorMachida M.pt_BR
dc.contributor.authorLebedev S.V.pt_BR
dc.contributor.authorCampos D.O.pt_BR
unicamp.authorMoshkalyov, S.A., Instituto de Física (DEQ), Universidade Estadual de Campinas, UNICAMP, C. P. 6165, 13083-970-Campinas, S. P., Brazilpt_BR
unicamp.authorMachida, M., Instituto de Física (DEQ), Universidade Estadual de Campinas, UNICAMP, C. P. 6165, 13083-970-Campinas, S. P., Brazilpt_BR
unicamp.authorLebedev, S.V., Instituto de Física (DEQ), Universidade Estadual de Campinas, UNICAMP, C. P. 6165, 13083-970-Campinas, S. P., Brazilpt_BR
unicamp.authorCampos, D.O., Instituto de Física (DEQ), Universidade Estadual de Campinas, UNICAMP, C. P. 6165, 13083-970-Campinas, S. P., Brazilpt_BR
dc.description.abstractThe experimental results on GaAs RIE in Cl2/Ar are considered within the framework of the ion-neutral synergy model. It has been shown, that the model gives a good agreement with the etch rate data obtained for low Cl2 partial pressure, but fails at the increased chlorine percentage. A possible contribution of vibrationally excited Cl2 molecules to GaAs etch rate has been considered.en
dc.relation.ispartofJapanese Journal of Applied Physics, Part 2: Letterspt_BR
dc.date.issued1996pt_BR
dc.identifier.citationJapanese Journal Of Applied Physics, Part 2: Letters. , v. 35, n. 7 SUPPL. B, p. L940 - L943, 1996.pt_BR
dc.language.isoenpt_BR
dc.description.volume35pt_BR
dc.description.issuenumber7 SUPPL. Bpt_BR
dc.description.firstpageL940pt_BR
dc.description.lastpageL943pt_BR
dc.rightsfechadopt_BR
dc.sourceScopuspt_BR
dc.identifier.issn214922pt_BR
dc.identifier.urlhttp://www.scopus.com/inward/record.url?eid=2-s2.0-0030195448&partnerID=40&md5=03dd2c8c043bde9b23c1c377cd8c5fa9pt_BR
dc.date.available2015-06-26T17:03:45Z
dc.date.available2015-11-26T14:19:07Z-
dc.date.accessioned2015-06-26T17:03:45Z
dc.date.accessioned2015-11-26T14:19:07Z-
dc.description.provenanceMade available in DSpace on 2015-06-26T17:03:45Z (GMT). No. of bitstreams: 1 2-s2.0-0030195448.pdf: 618864 bytes, checksum: 2cec613c8c65f653fe3b14992954cc9c (MD5) Previous issue date: 1996en
dc.description.provenanceMade available in DSpace on 2015-11-26T14:19:07Z (GMT). No. of bitstreams: 2 2-s2.0-0030195448.pdf: 618864 bytes, checksum: 2cec613c8c65f653fe3b14992954cc9c (MD5) 2-s2.0-0030195448.pdf.txt: 563 bytes, checksum: 53d3a6fa1a7fffa8131ab3fa2f66109b (MD5) Previous issue date: 1996en
dc.identifier.urihttp://www.repositorio.unicamp.br/handle/REPOSIP/95647
dc.identifier.urihttp://repositorio.unicamp.br/jspui/handle/REPOSIP/95647-
dc.identifier.idScopus2-s2.0-0030195448pt_BR
dc.description.referenceDulkin, A.E., Pyataev, V.Z., Sokolova, N.O., Moshkalyov, S.A., Smirnov, A.S., Frolov, K.S., (1993) Vacuum, 44, p. 913pt_BR
dc.description.referenceBailey III, A.D., Van De Sanden, M.C.M., Gregus, J.A., Gottscho, R.A., (1995) J. Vac. Sci. & Technol. B, 13, p. 92pt_BR
dc.description.referenceDulkin, A.E., Moshkalyov, S.A., Smirnov, A.S., Frolov, K.S., (1993) Technical Phys., 38, p. 564pt_BR
dc.description.referenceDavis, R.J., Wolf, E.D., (1990) J. Vac. Sci. & Technol. B, 8, p. 1798pt_BR
dc.description.referenceManenschijn, A., Janssen, G.C.A.M., Van Der Drift, E., Radelaar, S., (1991) J. Appl. Phys., 69, p. 1253pt_BR
dc.description.referenceJurgensen, C.W., (1988) J. Appl. Phys., 64, p. 590pt_BR
dc.description.referenceHa, J.H., Ogryzlo, E.A., (1991) Plasma Chem. Plasma Proc., 11, p. 311pt_BR
dc.description.referenceGeis, M.G., Efremow, N.N., Pang, S.W., Anderson, A.C., (1987) J. Vac. Sci. & Technol., B5, p. 363pt_BR
dc.description.referenceOno, K., Oomori, T., Tuda, M., (1992) Jpn. J. Appl. Phys., 31, pp. L269pt_BR
dc.description.referenceOno, T., Kashima, H., Hiraoka, S., Suzuki, K., (1991) J. Vac. Sci. & Technol. B, 9, p. 2798pt_BR
dc.description.referenceChapman, S., Cowling, T.G., (1970) The Mathematical Theory of Non-uniform Gases, p. 228. , Cambridge University Presspt_BR
dc.description.referenceHerzberg, G., (1950) Spectra of Diatomic Molecules, p. 123. , Van Nostrand Company, N. Ypt_BR
dc.description.referenceLee, J.W., Hong, J., Pearton, S.J., (1996) Appl. Phys. Lett., 68, p. 847pt_BR
Appears in Collections:Unicamp - Artigos e Outros Documentos

Files in This Item:
File Description SizeFormat 
2-s2.0-0030195448.pdf604.36 kBAdobe PDFView/Open


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.