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Type: Artigo de periódico
Title: Optical And Electrical Characteristics Of Dlc Film Growth At Low Temperature Pecvd
Author: de Amorim H.A.
Alves M.A.R.
Braga E.S.
Frejlich J.
Cescato L.
Abstract: DLC films deposited by PECVD of CH4 at room temperature were characterized by optical and electrical measurements. The films presented good smoothness and uniformity for large areas and were transparent for I.R. radiation and had high electrical resistivity. The viability of such films to produce MIS diodes was demonstrated.
Editor: ABEQ, Sao Paulo, Brazil
Citation: Brazilian Journal Of Chemical Engineering. Abeq, Sao Paulo, Brazil, v. 12, n. 3, p. 126 - 138, 1995.
Rights: aberto
Date Issue: 1995
Appears in Collections:Unicamp - Artigos e Outros Documentos

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