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Type: Artigo de periódico
Title: From Photocorrosion To Photoelectrochemical Etching
Author: Decker F.
Soltz D.A.
Cescato L.
Abstract: A short report is given on the technique of photoelectrochemical etching. The basic principles and the existing literature on photoetching are reviewed. It appears that this technique has a number of applications in semiconductor characterization, in optics, in electronic devices fabrication and in solar energy conversion devices. Special attention is devoted to the photoelectrochemical etching processes of III-V compound semiconductors and experimental results of the etching of InP are reported. The micro-reliefs obtained on InP by photoetching are described and possible applications are discussed. © 1992.
Citation: Electrochimica Acta. , v. 38, n. 1, p. 95 - 99, 1993.
Rights: fechado
Identifier DOI: 10.1016/0013-4686(93)80013-P
Date Issue: 1993
Appears in Collections:Unicamp - Artigos e Outros Documentos

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